Stator element for a holweck pump stage, vacuum pump having a holweck pump stage and method of manufacturing a stator element for a holweck pump stage

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United States of America Patent

PATENT NO 9784284
SERIAL NO

14258091

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Abstract

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A stator element for a Holweck pump stage has a base shape of substantially cylinder jacket shape or a kit of parts for a stator element for a Holweck pump stage which has a base shape of a substantially cylinder jacket shape, wherein the stator element or the kit of parts comprises a plurality of stator parts which are separate from one another, which are assembled to form the stator element or can be assembled to form the stator element. A vacuum pump having a Holweck pump stage as well as to a method of manufacturing a stator element for a Holweck pump stage or of manufacturing a kit of parts for a stator element for a Holweck pump stage are also disclosed.

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Patent Owner(s)

Patent OwnerAddress
PFEIFFER VACUUM GMBHBERLINER STRASSE 43 D-35614 ASSLAR

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hofmann, Jan Gruenberg, DE 13 20
Mekota, Mirko Ehringshausen, DE 5 11

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