Inspection apparatus, coordinate detection apparatus, coordinate detection method, and wavefront aberration correction method
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United States of America Patent
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Oct 10, 2017
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app pub date -
Aug 27, 2015
filing date -
Sep 19, 2014
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Abstract
In an inspection apparatus according to one aspect of the present invention, a processing apparatus includes: a profile data generation unit that divides each of a plurality of images according to a circumferential position to generate profile data in which a radial direction position and luminance data are associated with each other; a deconvolution operation unit that carries out a deconvolution operation using a one-dimensional point spread function to generate deconvolution operation data based on the profile data; an estimation unit that estimates estimation data of the deconvolution operation data in a desired focus position in the optical axis direction using the deconvolution operation data; and a synthesis unit that synthesizes the estimation data estimated by the estimation unit for each radial direction position to generate the image in the desired focus position.
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