Two stage forming of resistive random access memory cells

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United States of America Patent

PATENT NO 9786368
APP PUB NO 20160149130A1
SERIAL NO

14552034

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Provided are memory cells, such as resistive random access memory (ReRAM) cells, each cell having multiple metal oxide layers formed from different oxides, and methods of manipulating and fabricating these cells. Two metal oxides used in the same cell have different dielectric constants, such as silicon oxide and hafnium oxide. The memory cell may include electrodes having different metals. Diffusivity of these metals into interfacing metal oxide layers may be different. Specifically, the lower-k oxide may be less prone to diffusion of the metal from the interfacing electrode than the higher-k oxide. The memory cell may be formed to different stable resistive levels and then resistively switched at these levels. Each level may use a different switching power. The switching level may be selected a user after fabrication of the cell and in, some embodiments, may be changed, for example, after switching the cell at a particular level.

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Patent Owner(s)

  • INTERMOLECULAR, INC.;SANDISK 3D LLC;KABUSHIKI KAISHA TOSHIBA

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Nardi, Federico Palo Alto, US 35 170
Wang, Yun San Jose, US 444 6534

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