Reticle rack system

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9786536
SERIAL NO

15355289

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The present disclosure relates to semiconductor manufacturing, in particular to reticle rack systems. The teachings of the present disclosure may be embodied in a reticle rack unit including a frame with four uprights and multiple crossbars and four turnstiles. The frame may have a longest dimension defining a front side and a back side. The four turnstiles may be mounted to the frame to pivot around a respective rotational axis parallel to the four uprights. Each turnstile may define a plurality of reticle nests sized to hold reticles.

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Patent Owner(s)

Patent OwnerAddress
MICROCHIP TECHNOLOGY INCORPORATED2355 WEST CHANDLER BOULEVARD CHANDLER AS 85224

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Escandon, Andy Gilbert, US 1 4
Hernandez, Gilbert Gilbert, US 1 4
Irish, Ryan Chandler, US 3 6
Kudel, Sean Chandler, US 1 4
Read, Spencer Mesa, US 47 1206
Valestin, Joanne Queen Creek, US 1 4

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