Resonator element, resonator, resonator device, oscillator, electronic apparatus, and moving object

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United States of America Patent

PATENT NO 9787281
APP PUB NO 20160277004A1
SERIAL NO

15070505

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Abstract

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A resonator element includes a substrate having a first region performing thickness shear vibration, a second region located in a periphery of the first region and having a smaller thickness than the first region, a fixed end, and a free end opposite to the fixed end in the first region in a plan view. Excitation electrodes are disposed on a front and a rear of the first region and have regions overlapping each other in the plan view. A center of the first region and a center of the regions overlapping each other are located between a center of the substrate and the free end in the plan view. When Cs is a distance between the center of the regions overlapping each other and the center of the substrate in the plan view, a relation of 105 μm

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Patent Owner(s)

  • SEIKO EPSON CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kobayashi, Junji Minamiminowa, JP 62 326
Nishide, Jun Ina, JP 2 3

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