Strontium precursor, method for preparing same, and method for forming thin film by using same

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United States of America Patent

PATENT NO 9790238
SERIAL NO

14398878

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Abstract

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Disclosed herein is a novel strontium precursor containing a beta-diketonate compound. Being superior in thermal stability and volatility, the strontium precursor can form a quality strontium thin film.

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Patent Owner(s)

Patent OwnerAddress
KOREA RESEARCH INSTITUTE OF CHEMICAL TECHNOLOGY141 GAJEONG-RO YUSEONG-GU DAEJEON 34114

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
An, Ki-Seok Daejeon, KR 9 531
Chung, Taek-Mo Daejeon, KR 9 531
George, Sheby Mary Daejeon, KR 2 0
Jeon, Dong-Ju Daejeon, KR 5 30
Jeong, Seog-Jong Daejeon, KR 1 0
Kim, Chang-Gyoun Daejeon, KR 8 525
Lee, Sun-Sook Daejeon, KR 5 519
Lee, Young-Kuk Daejeon, KR 3 513
Lim, Jong-Sun Daejeon, KR 10 46
Park, Bo-Keum Gangwon-do, KR 1 0

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