Emissivity controlled coatings for semiconductor chamber components

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United States of America Patent

PATENT NO 9790581
SERIAL NO

14562810

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Abstract

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A component for a semiconductor processing chamber, the component including a substrate and a coating layer provided on a surface of the substrate, wherein the coating layer includes at least a first coating layer having a thermal emissivity of more than 0.98 to 1, having plasma resistance, and having a color value L in a range of 35 to 40 through a thickness direction thereof.

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Patent Owner(s)

  • FM INDUSTRIES, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hammerich, David Fremont, US 2 331
Naim, Mahmood Poughkeepsie, US 5 402

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