Temperature control apparatus, processing apparatus, and temperature control method
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United States of America Patent
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Oct 17, 2017
Issued Date -
N/A
app pub date -
Nov 9, 2012
filing date -
Nov 14, 2011
priority date (Note) -
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Abstract
A temperature control apparatus (70) includes a heat exchanger (71) configured to exchange heat with the surroundings using a phase change of a refrigerant, a rotary pump (73) configured to receive the refrigerant from the heat exchanger (71) and fuse the refrigerant with oil contained inside the rotary pump, and an oil water separator (74) configured to receive the refrigerant fused with the oil from the rotary pump (73) and separate the refrigerant from the oil. The temperature control apparatus further includes a refrigeration cycle that implements a cooling function by circulating the refrigerant separated from the oil back to the heat exchanger (71).
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