Image generation apparatus
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United States of America Patent
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Oct 17, 2017
Grant Date -
N/A
app pub date -
Jun 28, 2016
filing date -
Jun 28, 2016
priority date (Note) -
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status (Latency Note)
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Abstract
There is disclosed an image generation apparatus which is capable of generating a clear image by reducing vibration of the image. The image generation apparatus includes an electron-optics column having an electron gun, a deflector, a condenser lens, and an objective lens, a displacement detector for detecting a displacement of an XY stage, a stage-position measuring device for specifying a position of the XY stage based on an output signal of the displacement detector, an accelerometer for detecting vibration of the electron-optics column, an acceleration-signal processing device for processing an output signal of the accelerometer, and a deflection-controlling device for controlling operation of the deflector. The deflection-controlling device adds a first vibration signal outputted from the acceleration-signal processing device to a second vibration signal outputted from the stage-position measuring device to generate a deflection correcting signal, and causes the deflector to correct the deflection of a charged-particle beam based on the deflection correcting signal.
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