Method of cyclic dry etching using etchant film

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United States of America Patent

PATENT NO 9793135
SERIAL NO

15210256

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Abstract

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A method for etching a target layer on a substrate by a dry etching process includes at least one etching cycle, wherein an etching cycle includes: depositing a halogen-containing film using reactive species on the target layer on the substrate; and etching the halogen-containing film using a plasma of a non-halogen etching gas, which plasma alone does not substantially etch the target layer, to generate etchant species at a boundary region of the halogen-containing film and the target layer, thereby etching a portion of the target layer in the boundary region.

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Patent Owner(s)

  • ASM IP HOLDING B.V.;NATIONAL UNIVERSITY CORPORATION NAGOYA UNIVERSITY;NATIONAL UNIVERSITY CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hori, Masaru Nisshin, JP 79 2430
Kobayashi, Akiko Tokyo, JP 33 4924
Kobayashi, Nobuyoshi Kawagoe, JP 65 4259
Kondo, Hiroki Nagoya, JP 161 1637
Tsutsumi, Takayoshi Nagoya, JP 21 1154
Zaitsu, Masaru Kawasaki, JP 14 4163

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