Wafer holder and temperature conditioning arrangement and method of manufacturing a wafer

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United States of America Patent

PATENT NO 9793144
SERIAL NO

13220903

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Abstract

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A wafer holder and temperature controlling arrangement has a metal circular wafer carrier plate, which covers a heater compartment. In the heater compartment a multitude of heater lamp tubes is arranged, which directly acts upon the circular wafer carrier plate. Latter is drivingly rotatable about the central axis. A wafer is held on the circular wafer carrier plate by means of a weight-ring residing upon the periphery of a wafer deposited on the wafer carrier plate.

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Patent Owner(s)

Patent OwnerAddress
EVATEC AGHAUPTSTRASSE 1A TRÜBBACH 9477

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kielwein, Juergen Rankweil, AT 2 8
Lodder, Rogier Bad Ragaz, CH 13 101
Scholte, Von Mast Bart Azmoos, CH 6 37

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