Capacitive microphone with integrated cavity

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United States of America Patent

PATENT NO 9794711
SERIAL NO

15372927

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Importance

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Abstract

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A capacitive microphone and method of fabricating the same are provided. One or more holes can be formed in a first printed circuit board (PCB). A diaphragm can be surface micromachined onto an interior surface of the first PCB at a region having the one or more holes. Interface electronics can also be interconnected to the interior surface of the PCB. One or more spacer PCBs can be attached to a second PCB to the first PCB, such that appropriate interconnections between interconnect vias are made. The second PCB and first PCB with spacers in between can be attached so as to create a cavity in which the diaphragm and interface electronics are located.

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Patent Owner(s)

  • UNIVERSITY OF FLORIDA RESEARCH FOUNDATION, INC.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Arnold, David Patrick Gainesville, US 16 273
Sheplak, Mark Gainesville, US 22 254

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