AZA-polysilane precursors and methods for depositing films comprising same

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9796739
APP PUB NO 20150147871A1
SERIAL NO

14293554

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

Described herein are precursors and methods for forming silicon-containing films. In one aspect, there is provided an aza-polysilane precursor comprising at least two Si—N bonds, at least one Si—Si bond, and at least two SiH2 groups represented by the following Formula IA, IB and IC:

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

  • VERSUM MATERIALS US, LLC

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Lei, Xinjian Vista, US 192 10927
Spence, Daniel P Carlsbad, US 47 1096
Xiao, Manchao San Diego, US 134 11347

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
7.5 Year Payment $3600.00 $1800.00 $900.00 Apr 24, 2025
11.5 Year Payment $7400.00 $3700.00 $1850.00 Apr 24, 2029
Fee Large entity fee small entity fee micro entity fee
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00