Method for coating a substrate

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United States of America Patent

PATENT NO 9799554
APP PUB NO 20160300759A1
SERIAL NO

15093834

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Abstract

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A method for coating substrates provided with vias uses a first step in which the substrate is conditioned and a second step in which the substrate is coated with an electrically insulating material such that the vias are filled up completely.

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Patent Owner(s)

Patent OwnerAddress
SUSS MICROTEC LITHOGRAPHY GMBHSCHLEISSHEIMER STRASSE 90 GARCHING 85748

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fischer, Katrin Stuttgart, DE 5 34
Palitschka, Florian Gauting, DE 4 6
Southworth, Darren Robert Munich, DE 1 2
Whitney, William Monkton, US 16 148

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