Fuse elements and methods for forming the same
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United States of America Patent
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Oct 24, 2017
Grant Date -
N/A
app pub date -
Feb 6, 2017
filing date -
Feb 6, 2017
priority date (Note) -
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status (Latency Note)
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Abstract
A fuse element includes a metal layer disposed on a substrate. The metal layer includes an intermediate segment, a first block and a second block. The first block and the second block are electrically connected to two respective ends of the intermediate segment. The fuse element also includes a dielectric layer covering the intermediate segment, the first block and the second block, a first passivation layer disposed on the dielectric layer, and a second passivation layer disposed on the first passivation layer. The fuse element further includes an opening penetrating through the first passivation layer, the second passivation layer and a portion of the dielectric layer, and located above the intermediate segment. In addition, a protective film is disposed on a bottom and a portion of a sidewall of the opening, and covers the first passivation layer exposed by the opening.
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