Composition for forming topcoat layer and resist pattern formation method employing the same

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United States of America Patent

PATENT NO 9804493
APP PUB NO 20150147701A1
SERIAL NO

14549911

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Abstract

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Provided is a composition for forming a topcoat layer, the composition including a graphene derivative including a hydrophilic group; and a solvent. Also provided is a pattern formation method, including disposing a resist composition on a substrate, to form a resist layer; coating the resist layer with a composition including a graphene derivative including a hydrophilic group, and a solvent; heating the composition to harden the composition; subjecting the resist layer to exposure using extreme ultraviolet light; and developing exposed resist layer with an alkali aqueous solution.

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Patent Owner(s)

  • SAMSUNG ELECTRONICS CO., LTD.;AZ ELECTRONIC MATERIALS (LUXEMBOURG) S.A.R.L.;AZ ELECTRONICS MATERIALS (LUXEMBOURG) S.A.R.L.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hama, Yusuke Kakegawa, JP 10 10
Kim, Hyun-woo Seongnam-si, KR 146 1495
Okayasu, Tetsuo Kakegawa, JP 12 40
Park, Cheol hong Seoul, KR 4 9
Pawlowski, Georg Kakegawa, JP 73 934
Wang, Xiaowei Kakegawa, JP 101 941

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