Semiconductor device with protected sidewalls and methods of manufacturing thereof

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9806034
SERIAL NO

15183940

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Abstract

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A method of protecting sidewalls a plurality of semiconductor devices is disclosed. The method includes fabricating the plurality of semiconductor devices on a semiconductor wafer, etching to form a trench grid network on the backside of the semiconductor wafer. The trench grid network demarcate physical boundaries of each of the plurality of semiconductor devices. The method also includes depositing a protective layer on the backside and etching to remove the protective layer from horizontal surfaces and to singulate each of the plurality of semiconductor devices from the semiconductor wafer.

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Patent Owner(s)

Patent OwnerAddress
NEXPERIA B VNIJMEGEN NIJMEGEN GELDERLAND

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Brenner, Rolf Hamburg, DE 19 162
Burmeister, Frank Hamburg, DE 12 23
Funke, Hans-Juergen Luebeck, DE 14 7
Schnitt, Wolfgang Hamburg, DE 22 105
Sprogies, Tobias Hamburg, DE 4 1
Weber, Rüdiger Pinneberg, DE 2 13

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