Solid state image pickup apparatus and method for manufacturing the same
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United States of America Patent
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Oct 31, 2017
Grant Date -
May 12, 2016
app pub date -
Dec 29, 2015
filing date -
Jan 16, 2013
priority date (Note) -
In Force
status (Latency Note)
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Abstract
When forming a hollow portion between each color filter, in order to realize the formation of the hollow portions with a narrower width, a plurality of light receiving portions are formed on the upper surface of a semiconductor substrate, a plurality of color filters corresponding to each of the light receiving portions are formed above the semiconductor substrate, a photoresist is formed on each color filter, side walls are formed on the side surfaces of the photoresist, and a hollow portion is formed between each color filter by performing etching using at least the side walls as a mask.
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