Photonic devices and methods of using and making photonic devices

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United States of America Patent

PATENT NO 9806485
SERIAL NO

15052809

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Abstract

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Examples of the present invention include integrated erbium-doped waveguide lasers designed for silicon photonic systems. In some examples, these lasers include laser cavities defined by distributed Bragg reflectors (DBRs) formed in silicon nitride-based waveguides. These DBRs may include grating features defined by wafer-scale immersion lithography, with an upper layer of erbium-doped aluminum oxide deposited as the final step in the fabrication process. The resulting inverted ridge-waveguide yields high optical intensity overlap with the active medium for both the 980 nm pump (89%) and 1.5 μm laser (87%) wavelengths with a pump-laser intensity overlap of over 93%. The output powers can be 5 mW or higher and show lasing at widely-spaced wavelengths within both the C- and L-bands of the erbium gain spectrum (1536, 1561 and 1596 nm).

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Patent Owner(s)

  • MASSACHUSETTS INSTITUTE OF TECHNOLOGY

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bradley, Jonathan B Boston, US 2 6
Cherchi, Matteo Espoo, FI 15 153
Hosseini, Ehsan Shah Medford, US 19 42
Purnawirman, Purnawirman Watertown, US 3 19
Sun, Jie Cambridge, US 198 1707
Watts, Michael R Hinghan, US 38 782

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