Roller pressing device, imprinting device, and roller pressing method
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United States of America Patent
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Nov 7, 2017
Issued Date -
N/A
app pub date -
Jun 19, 2013
filing date -
Jun 21, 2012
priority date (Note) -
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status (Latency Note)
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Abstract
A roller-type depressing device, an imprint device and an imprint method utilizing the same which can depress an object like a die or a molding target by controlling the depressing force of a roller is provided. A roller-type depressing device to depress the object with a roller includes a pressure adjusting plate provided with the roller, a roller moving unit moving the roller relative to the object, a pressure adjusting unit holding the pressure adjusting plate in such a way that force produced by a pressure difference in fluid applied to both faces of the pressure adjusting plate acts on the roller, a pressure receiving stage receiving the pressure of the roller via the object, and a pressure adjuster adjusting the pressure difference in fluid applied to both faces of the pressure adjusting plate.
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