Salt, resin, resist composition and method for producing resist pattern

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United States of America Patent

PATENT NO 9809669
APP PUB NO 20160145205A1
SERIAL NO

14952420

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A salt represented by formula (I):

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Patent Owner(s)

  • SUMITOMO CHEMICAL COMPANY, LIMITED

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ichikawa, Koji Osaka, JP 299 1929
Sakamoto, Hiromu Osaka, JP 24 202

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