Method and apparatus of operating a scanning probe microscope

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United States of America Patent

PATENT NO 9810713
SERIAL NO

15057963

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Abstract

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Methods and apparatuses are provided for automatically controlling and stabilizing aspects of a scanning probe microscope (SPM), such as an atomic force microscope (AFM), using Peak Force Tapping (PFT) Mode. In an embodiment, a controller automatically controls periodic motion of a probe relative to a sample in response to a substantially instantaneous force determined, and automatically controls a gain in a feedback loop. A gain control circuit automatically tunes a gain based on separation distances between a probe and a sample to facilitate stability. Accordingly, instability onset is quickly and accurately determined during scanning, thereby eliminating the need of expert user tuning of gains during operation.

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Patent Owner(s)

  • BRUKER NANO, INC.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hu, Shuiqing Santa Barbara, US 26 134
Hu, Yan Ventura, US 64 251
Ma, Ji Thousand Oaks, US 46 282
Shi, Jian Ventura, US 106 836
Su, Chanmin Ventura, US 61 692

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