Method for manufacturing magnetic storage device, and magnetic storage device

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United States of America Patent

PATENT NO 9812497
SERIAL NO

13070714

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Importance

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Abstract

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A lower conductive film is formed over a substrate. A first insulating film is formed in the lower conductive film. An opening which reaches the lower conductive film is formed in the first insulating film. An MTJ multilayer film having a magnetization free layer, a tunnel barrier layer and a magnetization fixed layer is deposited over the lower conductive film in the opening and over the first insulating film. An upper electrode is formed over the MTJ multilayer film. By removing the portion of the MTJ multilayer film deposited over the first insulating film, an MTJ device composed of the portion of the MTJ multilayer film which has remained in the opening is formed. A lower electrode composed of the lower conductive film is formed under the MTJ device by removing at least a part of the first insulating film, and a part of the lower conductive film.

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Patent Owner(s)

Patent OwnerAddress
FUJITSU SEMICONDUCTOR LIMITED2-10-23 SHIN-YOKOHAMA KOHOKU-KU YOKOHAMA-SHI KANAGAWA 222-0033

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hatada, Akiyoshi Yokohama, JP 37 607

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