Dust filter mounted in semiconductor waste gas treatment equipment
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United States of America Patent
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Nov 14, 2017
Issued Date -
N/A
app pub date -
Feb 24, 2016
filing date -
Nov 26, 2015
priority date (Note) -
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Abstract
A dust filter mounted in a semiconductor waste gas treatment equipment comprising a housing having a chamber in the housing for passing a gas containing a water molecular and a dust through; and one or more main filtration boxes which can be implanted into the chamber by withdrawing way. One or more capturing rings and a filtering cotton for filtering the water molecular and the dust from the gas being disposed in the main filtration box, and the gas being sequentially passed through the capturing ring and the filtering cotton. It is an objective to solve a problem saying that it is not easy to clean the conventional dust filter because the structure of it is too complex.
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