Nano imprinting with reusable polymer template with metallic or oxide coating

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United States of America Patent

PATENT NO 9816186
SERIAL NO

14922953

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Abstract

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Methods and systems are provided for fabricating polymer-based imprint lithography templates having thin metallic or oxide coated patterning surfaces. Such templates show enhanced fluid spreading and filling (even in absence of purging gases), good release properties, and longevity of use. Methods and systems for fabricating oxide coated versions, in particular, can be performed under atmospheric pressure conditions, allowing for lower cost processing and enhanced throughput.

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Patent Owner(s)

  • MOLECULAR IMPRINTS, INC.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ahn, Se Hyun Mountain View, US 14 176
Choi, Byung-Jin Austin, US 182 2069
Xu, Frank Y Round Rock, US 157 2298

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