Movable mirror device

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9817228
SERIAL NO

14934270

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Importance

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Abstract

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A movable mirror device is provided as a unitary device with a position sensor and an analog-to-digital converter included in the unitary device.

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First Claim

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Patent Owner(s)

Patent OwnerAddress
CARL ZEISS MICROSCOPY GMBH07745 JENA
CARL ZEISS AG73447 OBERKOCHEN

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Thiele, Dirk Jena, DE 21 1240
Wehe, Carsten Weimar, DE 6 1

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