Extreme ultraviolet (EUV) pod having marks

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9817306
SERIAL NO

14862334

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Abstract

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The present invention relates to an EUV pod having marks, which comprises a mask pod and one or more mark disposed on the mask pod. One or more sensor of a processing machine is used for detecting the one or more mark. By including the one or more mark, the surface roughness of one or more region of the mask pod detectable by the one or more sensor can be altered. The one or more sensor emits light to the mask pod, which reflects the light to the one or more sensor. The one or more sensor receives the reflection light from the mask pod and judges if the voltage generated by the reflection light falls within the reflection ranges of the mark. Thereby, whether the one or more sensor corresponds to the one or more make can be confirmed.

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Patent Owner(s)

Patent OwnerAddress
GUDENG PRECISION INDUSTRIAL CO LTD9F -5 NO 2 SEC 4 ZHONGYANG RD TUCHENG DIST NEW TAIPEI CITY 236

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Cheng-Hsin New Taipei, TW 52 151
Chen, Wei-Yen New Taipei, TW 8 25
Lee, Cheng-Ju New Taipei, TW 17 127
Lin, Tien-Jui New Taipei, TW 7 14
Lu, Long-Ming New Taipei, TW 4 96

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