Liquid treatment apparatus and method and non-transitory storage medium

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United States of America Patent

PATENT NO 9817323
SERIAL NO

15040362

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Abstract

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A liquid treatment method includes: supplying a first organic solvent to a substrate with the substrate being held horizontally by a substrate holder; and thereafter supplying a second organic solvent to a substrate held by the substrate holder, the second solvent having a higher cleanliness than the first solvent.

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Patent Owner(s)

Patent OwnerAddress
TOKYO ELECTRON LIMITEDTOKYO 107-6325

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Yoshida, Yuichi Koshi, JP 151 1784
Yoshihara, Kousuke Koshi, JP 113 1395

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