Carrier system, exposure apparatus, carrier method, exposure method, device manufacturing method, and suction device
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United States of America Patent
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Nov 21, 2017
Grant Date -
Jan 28, 2016
app pub date -
Nov 27, 2013
filing date -
Nov 30, 2012
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A carrier system is provided with a wafer stage which holds a mounted wafer and is also movable along an XY plane, a chuck unit which holds the wafer from above in a non-contact manner above a predetermined position and is vertically movable, and a plurality of vertical movement pins, which can support from below the wafer held by the chuck unit on the wafer stage when the wafer stage is positioned at the predetermined position above and can also move vertically. Then, flatness of the wafer is measured by a Z position detection system, and based on the measurement results, the chuck unit and the vertical movement pins that hold (support) the wafer are independently driven.
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