Vacuum pump with back-up bearing contact sensor

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United States of America Patent

PATENT NO 9822788
APP PUB NO 20150292515A1
SERIAL NO

14438148

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The present invention relates to a vacuum pump comprising a vacuum pumping mechanism comprising a rotor supported for rotation by a drive shaft, a first bearing assembly for controlling movement of the rotor during rotation of the drive shaft, a back-up bearing assembly for limiting said movement and a sensor for sensing when said movement is limited by the back-up bearing assembly.

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Patent Owner(s)

  • EDWARDS LIMITED

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bahrami, Mohammad Eghtesadi Crawley, GB 2 3
Horler, Richard Glyn Crawley, GB 11 10

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