Plasma generation apparatus, deposition apparatus, and plasma generation method

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United States of America Patent

PATENT NO 9824867
APP PUB NO 20150107987A1
SERIAL NO

14391499

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Abstract

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Provided is a plasma generation apparatus capable of generating uniform plasma over a wide range. The plasma generation apparatus includes two oppositely arranged plasma guns each injecting a discharge gas to be ionized, and having a cathode for emitting electrons, and a converging coil for forming a magnetic flux to guide the emitted electrons, and polarities of the converging coils with respect to the cathodes in the two plasma guns are opposite to each other.

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Patent Owner(s)

Patent OwnerAddress
CHUGAI RO CO LTD3-6-1 HIRANOMACHI CHUO-KU OSAKA-SHI OSAKA 5410046 ?5410046

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Furuya, Eiji Osaka, JP 7 10

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