Chuck, in particular for use in a mask aligner
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United States of America Patent
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Nov 21, 2017
Grant Date -
Oct 15, 2015
app pub date -
Dec 4, 2013
filing date -
Jan 4, 2013
priority date (Note) -
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Abstract
A chuck for aligning a first planar substrate in parallel to a second planar substrate includes a top plate having a top surface for arrangement of the first planar substrate. A bottom plate is at least one distance measuring sensor configured to measure a distance between the top surface of the top plate and a surface of the second planar substrate, and at least three linear actuators in contact with the top plate and the bottom plate. The method for setting a gap between the first and second planar substrate includes measuring the thickness of the first planar substrate and measuring between a surface of the second planar substrate and the top surface of the top plate. The tilt adjusts between a top surface of the first planar substrate or the chuck and the surface of the second planar substrate by using at least three linear actuators of the chuck.
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