Functional element, physical quantity sensor, electronic apparatus and mobile entity
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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Nov 28, 2017
Issued Date -
N/A
app pub date -
Apr 27, 2015
filing date -
May 1, 2014
priority date (Note) -
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status (Latency Note)
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Abstract
An acceleration sensor includes a substrate, a support beam, a weight body a stationary section and an engaging section. The weight body is divided into a first weight section and a second weight section based on the support beam as a boundary line, and the first weight section and the second weight section have different weights from each other. The first weight section and the second weight section include a facing section which faces a side of the engaging section opposite to a side facing the support beam. In an X axis direction intersecting the Y axis direction, if a distance between a corner section of the engaging section in the vicinity of one end portion and the support beam is L1 and a distance between the engaging section and the facing section is L2, a relational expression, L1>L2 is satisfied.
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