Compliant electrostatic transfer head with defined cavity
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United States of America Patent
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Nov 28, 2017
Grant Date -
Mar 31, 2016
app pub date -
Sep 30, 2014
filing date -
Sep 30, 2014
priority date (Note) -
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Abstract
A compliant electrostatic transfer head and method of forming a compliant electrostatic transfer head are described. In an embodiment, a compliant electrostatic transfer head includes a base substrate, a cavity template layer on the base substrate, a first confinement layer between the base substrate and the cavity template layer, and a patterned device layer on the cavity template layer. The patterned device layer includes an electrode that is deflectable toward a cavity in the cavity template layer. In an embodiment, a second confinement layer is between the cavity template layer and the patterned device layer.
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