Pressure sensor, microphone, ultrasonic sensor, blood pressure sensor, and touch panel
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United States of America Patent
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Nov 28, 2017
Issued Date -
N/A
app pub date -
May 26, 2015
filing date -
May 26, 2014
priority date (Note) -
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Abstract
According to an embodiment, a pressure sensor includes a substrate, a support part, a flexible membrane part, and a magnetoresistive element. The support part is adhered on the substrate by using a first adhesive material with a first Young's modulus and a second adhesive material with a second Young's modulus different from the first Young's modulus. The membrane part is supported by the support part. The magnetoresistive element is provided on the membrane part, and includes a first magnetic layer, a second magnetic layer, and a spacer layer provided between the first magnetic layer and the second magnetic layer.
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