Method and system for characterization of nano- and micromechanical structures
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United States of America Patent
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Nov 28, 2017
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N/A
app pub date -
May 23, 2013
filing date -
Jun 7, 2012
priority date (Note) -
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Abstract
Method and system in optical microscopy based on the deflection of micro- and nanomechanical structures, upon impact of a laser beam thereon, which simultaneously and automatically provides a spatial map of the static deflection and of the form of various vibration modes, with vertical resolution in the subangstrom range. The invention comprises at least one mechanical structure, an incident laser beam sweeping the surface of the structure, an optometric detector for capturing the laser beam, and frequency excitation means that generate at least two sinusoidal signals at different frequencies in the mechanical structure.
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International Classification(s)
- G01H:MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC....
- B81C:PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE M....
- G01N:INVESTIGATING OR ANALYSING MATERIALS BY DETERMININ....
- G01Q:SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIO....
- B82B:NANO-STRUCTURES; MANUFACTURE OR TREATMENT THEREOF
- G01B:MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIME....
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