System for reclaiming, rebalancing and recirculating laser gas mixtures used in a high energy laser system

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United States of America Patent

PATENT NO 9831627
APP PUB NO 20170063016A1
SERIAL NO

15244307

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Abstract

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The present invention relates to a system for recirculating the gas atmosphere within an excimer laser system, where contaminates, created in the laser's operation, are removed, and the gas concentrations of additive gases, such as Xe, Kr, or others, depleted in the laser operation, are rebalanced to specific lasing mixtures by analyzation and component replenishment from one or more external supplies.

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Patent Owner(s)

Patent OwnerAddress
MATHESON TRI-GAS INC150 ALLEN ROAD BASKING RIDGE NJ 07920

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Scott, Dane Doylestown, US 5 26
Vininski, Joseph Boulder, US 5 45

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