Gas purge unit, load port apparatus, and installation stand for purging container
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United States of America Patent
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Dec 5, 2017
Issued Date -
N/A
app pub date -
May 27, 2016
filing date -
May 28, 2015
priority date (Note) -
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Abstract
A gas purge unit includes an intake nozzle 28, a pivotable body 31, and an O-ring 35. The intake nozzle 28 has a nozzle opening 26 flowing out a cleaning gas. The pivotable body 31 is arranged in ring shape to surround a cylindrical projection 28b of the nozzle 28, and is provided with a contact part 34 capable of detachably contacting with an intake port 5 on a tip portion of the pivotable body 31. The ring-shaped O-ring 33 is held between a rear end of the pivotable body 31 and a base portion 28a of the nozzle 28 in a compressively elastically deformable manner along a longitudinal direction of the cylindrical projection 28b.
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