Loader and buffer for reduced lot size

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United States of America Patent

PATENT NO 9834378
SERIAL NO

11644240

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Abstract

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A system comprising a load port and a transfer module. In one embodiment, the load port includes a plate having a first opening and a second opening, a first workpiece access port, a second workpiece access port and at least one storage location. The storage location(s) may be located either beneath the second workpiece access port or above the first workpiece access port. The transfer mosule, which is located adjacent the load port, includes a load arm for moving the workpiece containers between the first workpiece access port, the second workpiece access port, any of the storage shelves and a material transport system.

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Patent Owner(s)

Patent OwnerAddress
BROOKS AUTOMATION US LLC15 ELIZABETH DRIVE CHELMSFORD MA 01824

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bonora, Anthony C Portola Valley, US 117 6049
Hine, Roger G Menlo Park, US 63 3119
Rogers, Theodore W Alameda, US 110 6457

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