Loader and buffer for reduced lot size

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United States of America Patent

PATENT NO 9834378
SERIAL NO

11644240

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A system comprising a load port and a transfer module. In one embodiment, the load port includes a plate having a first opening and a second opening, a first workpiece access port, a second workpiece access port and at least one storage location. The storage location(s) may be located either beneath the second workpiece access port or above the first workpiece access port. The transfer mosule, which is located adjacent the load port, includes a load arm for moving the workpiece containers between the first workpiece access port, the second workpiece access port, any of the storage shelves and a material transport system.

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First Claim

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Patent Owner(s)

  • BROOKS AUTOMATION, INC.;CROSSING AUTOMATION, INC.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bonora, Anthony C Portola Valley, US 116 5496
Hine, Roger G Menlo Park, US 63 2777
Rogers, Theodore W Alameda, US 105 5284

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