Cobalt dishing control agents

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United States of America Patent

PATENT NO 9834704
APP PUB NO 20160108285A1
SERIAL NO

14919490

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Abstract

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The invention provides a chemical-mechanical polishing composition comprising (a) abrasive particles, (b) a cobalt corrosion inhibitor, (c) a cobalt dishing control agent, wherein the cobalt dishing control agent comprises an anionic head group and a C13-C20 aliphatic tail group, (d) an oxidizing agent that oxidizes cobalt, and (e) water, wherein the polishing composition has a pH of about 3 to about 8.5. The invention further provides a method of chemically-mechanically polishing a substrate with the inventive chemical-mechanical polishing composition. Typically, the substrate contains cobalt.

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Patent Owner(s)

  • CABOT MICROELECTRONICS CORPORATION

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Carter, Phillip W Round Lake, US 41 522
Kraft, Steven Naperville, US 29 85
Petro, Benjamin Aurora, US 10 25
Wolff, Andrew Darien, US 21 111

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