Plasma light source apparatus and light source system including the same

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United States of America Patent

PATENT NO 9839110
SERIAL NO

15222571

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Abstract

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A plasma light source apparatus includes a first laser generator configured to generate a first laser. A second laser generator is configured to generate a second laser. A chamber is configured to accommodate and seal a medium material for plasma ignition and to allow plasma to be ignited by the first laser and to be maintained by the second laser. An inner surface of the chamber includes two curved mirrors that face each other.

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Patent Owner(s)

Patent OwnerAddress
SAMSUNG ELECTRONICS CO LTD129 SAMSUNG-RO YEONGTONG-GU GYEONGGI-DO SUWON-SI 16677

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ahn, Jin-Woo Suwon-si, KR 15 33
Cho, Sung-Hwi Gwangju-si, KR 1 0
Jeon, Byeong-Hwan Yongin-si, KR 26 77
Joo, Won-Don Incheon, KR 10 26
Kim, Wook-Rae Suwon-si, KR 9 32
Lee, Jung-Chul Yongin-si, KR 6 72
Park, Young-Kyu Incheon, KR 9 50

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