Guide plate for a probe card and probe card provided with same

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9841438
SERIAL NO

15359157

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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It is an object of the invention to provide a guide plate for a probe card with fine through holes at tight pitches and with increased strength. The guide plate 100 for a probe card includes a metal base 110; first insulation layers 120; and metal layers 130. The metal base 110 has a plurality of through holes 111 to receive probes therethrough, and inner walls of the through holes 111. The first insulation layers 120 are of tuboid shape and provided on the respective inner walls of the through holes 111 of the metal base 110. The metal layers 130 are provided on the first insulation layers 120.

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Patent Owner(s)

  • JAPAN ELECTRONIC MATERIALS CORPORATION

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fan, Liwen Amagasaki, JP 2 4
Kimura, Teppei Amagasaki, JP 13 100

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