Apparatus and method for web-based tool management

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United States of America Patent

PATENT NO 9841752
SERIAL NO

14091317

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Abstract

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A method for controlling an automated manufacturing tool for semiconductor fabrication is provided, including the following method operations: receiving, over a network, a request from a client, the request defining an action for an automated manufacturing tool; authenticating the request; and, in response to receiving the request, triggering performance of the action by the automated manufacturing tool.

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Patent Owner(s)

Patent OwnerAddress
PEER INTELLECTUAL PROPERTY INCKITCHENER ON N2G 4Y9

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Baylis, Charles M Cincinnati, US 4 8
Ellis, Raymond W Austin, US 8 198
Pendleton, Mark T San Diego, US 2 6

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