Magnetic tunnel junction with low defect rate after high temperature anneal for magnetic device applications

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United States of America Patent

PATENT NO 9842988
SERIAL NO

14803111

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Abstract

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A magnetic tunnel junction is disclosed wherein the reference layer and free layer each comprise one layer having a boron content from 25 to 50 atomic %, and an adjoining second layer with a boron content from 1 to 20 atomic %. One of the first and second layers in each of the free layer and reference layer contacts the tunnel barrier. Each boron containing layer has a thickness of 1 to 10 Angstroms and may include one or more B layers and one or more Co, Fe, CoFe, or CoFeB layers. As a result, migration of non-magnetic metals along crystalline boundaries to the tunnel barrier is prevented, and the MTJ has a low defect count of around 10 ppm while maintaining an acceptable TMR ratio following annealing to temperatures of about 400° C. The boron containing layers are selected from CoB, FeB, CoFeB and alloys thereof including CoFeNiB.

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Patent Owner(s)

  • HEADWAY TECHNOLOGIES, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Jan, Guenole San Jose, US 115 2393
Lee, Yuan-Jen Fremont, US 60 403
Liu, Huanlong San Jose, US 46 423
Wang, Po-Kang Los Altos, US 133 2359
Zhu, Jian San Jose, US 156 531

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