Microwave supply apparatus, plasma processing apparatus, and plasma processing method

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United States of America Patent

PATENT NO 9852892
APP PUB NO 20170365446A1
SERIAL NO

15626905

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A microwave supply apparatus includes a waveguide, a circulator, and a matcher, a first port of the circulator receives a microwave from an input end. First and second ends of the waveguide are coupled to second and third ports of the circulator, respectively. The matcher is provided between the input end and the first port of the circulator. The waveguide includes a rectangular waveguide having first and second walls facing each other, and third and fourth walls facing each other. A slot hole is formed in the first wall, and the slot hole is provided at a region deviated to the third wall side. The waveguide includes a first ridge portion provided therein. The first ridge portion faces the slot hole, is in contact with the second wall and third wall, and is separated from the first wall and fourth wall.

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Patent Owner(s)

  • NATIONAL UNIVERSITY CORPORATION NAGOYA UNIVERSITY;TOKYO ELECTRON LIMITED

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hori, Masaru Nagoya, JP 79 2430
Itoh, Hitoshi Tokyo, JP 49 1276
Sekine, Makoto Nagoya, JP 47 1697
Suzuki, Haruka Nagoya, JP 10 3
Toyoda, Hirotaka Nagoya, JP 8 61

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