Wetting pretreatment for enhanced damascene metal filling

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9852913
SERIAL NO

14593676

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

Disclosed are pre-wetting apparatus designs and methods. These apparatus designs and methods are used to pre-wet a wafer prior to plating a metal on the surface of the wafer. Disclosed compositions of the pre-wetting fluid prevent corrosion of a seed layer on the wafer and also improve the filling rates of features on the wafer.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

  • NOVELLUS SYSTEMS, INC.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Mayer, Steven T Lake Oswego, US 215 6993
Porter, David W Sherwood, US 60 1083
Willey, Mark J Portland, US 14 303

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
7.5 Year Payment $3600.00 $1800.00 $900.00 Jun 26, 2025
11.5 Year Payment $7400.00 $3700.00 $1850.00 Jun 26, 2029
Fee Large entity fee small entity fee micro entity fee
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00