Embedded memory with enhanced channel stop implants

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United States of America Patent

PATENT NO 9853034
SERIAL NO

15091546

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An integrated circuit contains a logic MOS transistor and a memory MOS transistor of a same polarity. The logic MOS transistor has a logic channel stop layer. The memory MOS transistor has a memory channel stop layer. An average dopant density of the memory channel stop layer is higher than an average dopant density of the logic channel stop layer. The integrated circuit is formed by forming a global mask which exposes both the logic and memory MOS transistors. A global channel stop dose of dopants is implanted in the logic and memory MOS transistors. A memory mask is formed which exposes the memory MOS transistor and covers the logic MOS transistor. A memory channel stop dose of dopants of the same polarity is implanted into the memory MOS transistors. The memory channel stop dose of dopants are blocked from the logic MOS transistors.

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Patent Owner(s)

  • TEXAS INSTRUMENTS INCORPORATED

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Nandakumar, Mahalingam Richardson, US 103 781

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