Single-step interferometric radius-of-curvature measurements utilizing short-coherence sources
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United States of America Patent
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Jan 2, 2018
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app pub date -
Dec 20, 2016
filing date -
Dec 21, 2015
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Abstract
An interferometer includes a short-coherence source and an internal path-matching assembly contained within its housing. Because path matching occurs within the housing of the interferometer, it is removed from external environmental factors that affect measurements. Therefore, a single cateye measurement of an exemplary surface can be performed in advance and stored as a calibration for subsequent radius-of-curvature measurements. In one embodiment, a path-matching stage is incorporated into a dynamic interferometer where orthogonally polarized test and reference beams are fed to a dynamic imaging system. In another embodiment, orthogonal linearly polarized test and reference beams are injected into a remote dynamic interferometer by means of one single-mode polarization-maintaining optical fiber.
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