Method for generating image data relating to an object and particle beam device for carrying out this method

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United States of America Patent

PATENT NO 9857318
SERIAL NO

14778343

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Abstract

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Generating image data of an object using a particle beam includes arranging at least one mark in the object or in a support material in which the object is embedded, determining a first examination region, exposing the first examination region by removing material of at least one of: the object and the support material, guiding a first particle beam over the first examination region, and acquiring image data of the first examination region using at least one detector by detecting interaction particles and/or interaction radiation due to an interaction of the first particle beam with the first examination region. Generating image data of an object using a particle beam may also include introducing the object into a support material in such a way that the object is partly or completely surrounded by the support material. A second examination region of the object may be determined relative to the mark.

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Patent Owner(s)

Patent OwnerAddress
CARL ZEISS MICROSCOPY GMBH07745 JENA

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Pérez-Willard, Fabian Aalen, DE 1 3

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